Reliability evaluation of silicon microstructure

Silicon is a widely-used material for MEMS devices structure. It is a brittle material, so its mechanical reliability is important for the devices. We research about material testing method for tensile testing and fatigue testing of micro structures, and also conduct characterizations of the various influences; e.g. surface damage and crystal anisotropy, to discuss mechanism of fracture and fatigue.


  • Highly reliable and functional MEMS device
  • Development of standard for reliability test methods


  • Uesugi et. al, Trans. Japan Soc. Mech. Engineers A Vol. 79(2013) No. 804, p.1191-1200.