Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと，構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い，常温での異 ...
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans ...
MEMS reservoir computing using resonant accelerometer
Reservoir computing, which can utilize nonlinear physical dy ...
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a microelectromechanical system (MEMS) to fabri ...
Synchronization of MEMS mirror array
MEMS mirrors are optical devices that scan reflected light b ...
Thermionic generation with Nanogap
Thermionic generation is a method of power generation in whi ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Microfluidic device for separation of DNA origami complexes
Microfluidic device by using dielectrophoresis(DEP) is propo ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of ey ...
Nanogap device for thermionic generation
Devices and an external mechanism capable of nanogap formati ...
Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS
Silicon nanowire has excellent mechanical and electri ...