Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient ...
Depth Thermal Conductivity Analysis by ML
Increasing heat generation density in semiconductor devices ...
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting atten ...
Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) film is one of the ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
Mode-matched (100) silicon ring gyroscope
Recently, IoT society have demanded small-size and low-cost ...
Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した．
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects t ...
Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, high-efficiency ...
Electrostatic deformable mirror with moving substrate
Inspection light of funduscopy is warped by distortion of ey ...
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, sma ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...