Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) film is one of the ...
Dynamic Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
The aim of this research is to analyze local and instantaneo ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal obs ...
MEMS reservoir computing using resonant accelerometer
Reservoir computing, which can utilize nonlinear physical dy ...
Electrical conduction property measurement of fracture-fabricated silicon nanogap
半導体微細加工技術を用いて作製した単結晶シリコンMEMSデバイスの梁構造に(111)面でへき開破壊を用いて数μm角の均一 ...
Parallel tensile testing device with integrated shear strain gauge for SC-Si
In order to shorten testing time on tensile-mode fatigue tes ...
Mode Localization and Reservoir Computing of MEMS Resonator Array
Recently, physical reservoir computing (PRC) has attracted a ...