Al/Ni多層膜の自己伝播発熱反応を用いたMEMS振動型デバイスの真空封止
熱ストレスの小さいMEMS真空封止技術を実現することを目的として，ナノスケール厚で積層させたAl/Ni膜の合金化反応熱を ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as prom ...
Design and Analysis of Capacitive Vibrating Gyro using Electrical Equivalent Circuit
In this research, we aim to design the electrostatic gyro se ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...
Parallel tensile testing of silicon with integrated strain gauge
In order to shorten a testing time for evaluation of tensile ...
Tensile Testing for Carbon Nanotube using Electrostatic MEMS
We are developing the method for tensile test of Carbon nano ...
Tensile test of silicon nanowire by using electrostatic MEMS device
Silicon nanowire has excellent mechanical and electrical pro ...
Double stage electrode type Ionic liquids electrospray thruster
through-hole dry etching with Ni electroplated as a mask.
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a microelectromechanical system (MEMS) to fabri ...
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricate ...
Local Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
Evaluating local stress in the microstructure is in high dem ...
Tensile testing of silicon covered with DLC film
DLC (Diamond Like Carbon) film is one of the promising ...