(100) silicon ring gyroscope

In recent IoT society, miniaturization and price reduction of sensors have been expected. MEMS vibrating ring gyros have attracted attention because of small size, low cost, and high performance. In a previous study, a ring-type resonator was developed using (100) single-crystal silicon, which is lower fabrication costs than commonly used materials. However, the performance was degraded due to fabrication errors in semiconductor microfabrication process. In this study, we designed symmetrical ring resonator and improved tolerance to fabrication errors.

[Applications]

• Image stabillization
• Autonomous driving