Synchronization of MEMS mirror array

MEMS mirrors are optical devices that scan reflected light by torsional vibration of support beams on both sides of a mirror. A high-performance mirror is desired for application to spatial scanning systems such as endoscopes and lidars, but the performance is limited by mirror surface distortion and beam stress. In this research, to realize a high-performance spatial scanning system, we reduce the distortion and the stress by miniaturing the mirror and thinning the beam, compensate the reflection area by array arrangement of the mirrors, and synchronize the vibrations of the mirror array.

Conference Presentation

Mikiya Oki, Tomoya Nakamura, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
Design of MEMS torsional mirror array for synchronous vibration
The 13th Symposium on Micro-Nano Science and Technology, Tokushima, Japan (November 14-16, 2022), 15P2-PN-17