Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal obs ...
Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと,構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い,常温での異 ...
Properties of nanogap with single crystal silicon cleavage planes
Thermionic generation generates electricity by collecting th ...
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricate ...
Vacuum encapsulation of MEMS using self-propagating heat reaction of Al/Ni multilayer film
Development of a new vacuum sealing technology for MEMS reso ...
Temperature dependence of electron emission between cleavage planes for thermionic power generation
シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う
Piezoelectric Vibrating Gyroscope using Cylindrical Lithium Niobate Resonator
In recent years, automatic driving has been attracting atten ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...
MEMS fabricated nanogap electrodes
We have developed a microelectromechanical system (MEMS) to ...
Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsio ...
Tensile test of silicon nanowire by using electrostatic MEMS device
Silicon nanowire has excellent mechanical and electrical pro ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...