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Deformable mirror is used in adaptive optics for retinal obs ...
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Siで構成されるMEMSアクチュエータと,構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い,常温での異 ...
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Thermionic generation generates electricity by collecting th ...
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MEMS (Micro Electro Mechanical System) devices are fabricate ...
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Development of a new vacuum sealing technology for MEMS reso ...
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シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う
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In recent years, automatic driving has been attracting atten ...
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We have developed a microelectromechanical system (MEMS) to ...
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There are two types of fabrication processes for MEMS torsio ...
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Silicon nanowire has excellent mechanical and electrical pro ...
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A geometrical compensation design method in (100) single cry ...