Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, high-efficiency ...
MEMS Nanogap Device
In this research, a single crystal silicon beam was cleaved ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by d ...
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a microelectromechanical system (MEMS) to fabri ...
Al/Ni多層膜の自己伝播発熱反応を用いたMEMS振動型デバイスの真空封止
熱ストレスの小さいMEMS真空封止技術を実現することを目的として，ナノスケール厚で積層させたAl/Ni膜の合金化反応熱を ...
(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction o ...
Chamber for Diffracted X-ray Tracking
Diffracted X-ray Tracking (DXT) method is real-time imaging ...
ILEST with two-stage electrodes
We develop the ionic liquid electrospray thruster (ILEST) to ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize ...
MEMS Based SCS Cleavage Nanogap for Thermionic Generation
Thermionic generation generates electricity by collecting th ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...