Microfabricated alkali metal vapor cells
Miniaturization and reduced power consumption of atomic-base ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensi ...
Electrostatic MEMS for tensile-testing of nanomaterials
In this research, we focus on tensile testing of these mater ...
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
A geometrical compensation design method in (100) single cry ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fa ...
SAW Devices for Reservoir Computing
We are developing SAW (Surface acoustic wave) devices which ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...
Characterization of SWCNT with ssDNA
SWCNT (Single walled carbon nanotube) is known to have excep ...
MEMS Nanogap Device
In this research, a single crystal silicon beam was cleaved ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is us ...
Theoretical Analysis of (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs
For small-size, low-cost and high-performance gyroscopes, wi ...