MEMS Nanogap Device
In this research, a single crystal silicon beam was cleaved ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...
Nanogap device for thermionic generation
Devices and an external mechanism capable of nanogap formati ...
MEMS Reservoir Computing with accelerometer
Reservoir computing(RC) is a machine learning approach havin ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coati ...
Tensile test of silicon nanowire by using electrostatic MEMS device
Silicon nanowire has excellent mechanical and electrical pro ...
Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. E ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations cause ...
Assembly of single SWCNT modified by ssDNA using dielectrophoresis
To clarify the characteristic of SWCNT including its variabi ...
Analysis of Love-mode SAW device with phononic crystal waveguide
Surface acoustic waves (SAW) are widely used in high-frequen ...