Mode-matched (100) silicon ring gyroscope
Recently, IoT society have demanded small-size and low-cost ...
Physical Reservoir Computing with Heat Conduction
As the Internet of Things (IoT) continues to expand, reducin ...
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fa ...
Thermionic generation with Nanogap
Thermionic generation is a method of power generation in whi ...
MEMS Reservoir Computing using Frequency Modulated Accelerometer
For miniaturization and Intelligence of MEMS sensors, we ar ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of ey ...
MEMS Nanogap Device
In this research, a single crystal silicon beam was cleaved ...
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting atten ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...
Electrical conduction property measurement of fracture-fabricated silicon nanogap
半導体微細加工技術を用いて作製した単結晶シリコンMEMSデバイスの梁構造に(111)面でへき開破壊を用いて数μm角の均一 ...
Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した．