10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser ...
Electrochemical properties of MXene/CNT thin film
MXene, which is a two-dimensional layered nanomaterial, exhi ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
Piezoelectric Vibrating Gyroscope using Cylindrical Lithium Niobate Resonator
In recent years, automatic driving has been attracting atten ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coati ...
Matrix sensitivity calibration for 3-axis accelerometer
Matrix sensitivity calibration has been proposed to evaluate ...
Pluralization of Learning in PRC using MEMS Nonlinear Resonator Array
Recently, physical reservoir computing (PRC) has attracted a ...
Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した．
Tensile test of silicon nanowire by using electrostatic MEMS device
Silicon nanowire has excellent mechanical and electrical pro ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS
Silicon nanowire has excellent mechanical and electri ...