For miniaturization and Intelligence of MEMS sensors, we are developing resonant accelerometers that can learn and classify acceleration signal patterns using reservoir computing, which can use the micro-vibration of beams as a computational resource. In this research, we propose a device that changes the stiffness of a vibrating beam as a state change of the reservoir, and evaluate its learning performance.
- Visualization of motion state
- Abnormal vibration detection
- •Takahiro Mizumoto, Yoshikazu Hirai, Amit Banerjee, Toshiyuki Tsuchiya, IEEE MEMS 2022