MEMS Reservoir Computing using Frequency Modulated Accelerometer

　For miniaturization and Intelligence of MEMS sensors, we are developing resonant accelerometers that can learn and classify acceleration signal patterns using reservoir computing, which can use the micro-vibration of beams as a computational resource. In this research, we propose a device that changes the stiffness of a vibrating beam as a state change of the reservoir, and evaluate its learning performance.

[Applications]

• Visualization of motion state
• Abnormal vibration detection　

{Conference Publication]

• •Takahiro Mizumoto, Yoshikazu Hirai, Amit Banerjee, Toshiyuki Tsuchiya, IEEE MEMS 2022