Reliability of Single-Crystal Silicon Micromirrors

The purpose of this research is to realize high fracture strength and long fatigue life micromirrors with low cost. We compared the reliability of micromirrors made from Si and SOI wafers by fracture and fatigue tests under torsional load. Four types of micromirrors with different dimensions were fabricated using both wafers. Torsional fracture and fatigue tests were conducted using a custom-made vibration test system. The effect of the fabrication process was evaluated.


  • Micromirror device for LiDAR, mobile display, etc.