Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと，構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い，常温での異 ...
ILEST with two-stage electrodes
We develop the ionic liquid electrospray thruster (ILEST) to ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal obs ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting attention because t ...
Physical Reservoir Computing Using Nonlinear Heat Conduction
As the demand for machine learning and data analysis increas ...
Training MEMS devices for forecasting epileptic-seizures
Epilepsy is a chronic neurological disorder of the central n ...
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirro ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Coupled MEMS resonators for reservoir computing
Among hardware implementation methods of neuromorphic ...
Piezoelectric Vibrating Gyroscope using Cylindrical Lithium Niobate Resonator
In recent years, automatic driving has been attracting atten ...