Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure ...
(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction o ...
Training MEMS devices for forecasting epileptic-seizures
Epilepsy is a chronic neurological disorder of the central n ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans ...
Q-factor of Si nanoresonator
Nanoresonator is a mechanical beam with nano-scale thickness ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered poten ...
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, sma ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations cause ...
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coati ...