Tensile Testing for Carbon Nanotube using Electrostatic MEMS
We are developing the method for tensile test of Carbon nano ...
Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsio ...
Characterization of SWCNT with ssDNA
SWCNT (Single walled carbon nanotube) is known to have excep ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as prom ...
Q-factor of Si nanoresonator
Nanoresonator is a mechanical beam with nano-scale thickness ...
Thermo-acoustic phase modulator for physical reservoir computing
This study proposes a nonlinear thermo-acoustic phase modula ...
SAW Devices for Reservoir Computing
We are developing SAW (Surface acoustic wave) devices which ...
Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS
Silicon nanowire has excellent mechanical and electri ...
MEMS fabricated nanogap electrodes
We have developed a microelectromechanical system (MEMS) to ...
Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) film is one of the ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal obs ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...