Reliability of MEMS Mirror

MEMS torsional mirror resonator is a key component for sensing and media devices.  MEMS mirror can be fabricated at significantly lower material cost by using Si bulk wafer than using usual SOI one. In order to achieve high-reliability and low cost, torsional strength of two types of mirror devices fabricated from Si and SOI wafers were tested and compared in this research. Effect of fabrication process on initial strength of torsional beam were revealed by these work. In the future improvement of fabrication process and fatigue tests will conducted.

[Applications]

• LiDAR (Light Detection and Ranging)
• Image projector