Training MEMS devices for forecasting epileptic-seizures
Epilepsy is a chronic neurological disorder of the central n ...
A sub-micron-gap SOI capacitive accelerometer array utilizing size effect
MEMS capacitive accelerometers have been widely used for con ...
Ionic liquid electrospray thruster for nanosatellite
Recently, launches of satellites weigh less than 10 kg, call ...
Double stage electrode type Ionic liquids electrospray thruster
through-hole dry etching with Ni electroplated as a mask.
MEMS fabricated nanogap electrodes
We have developed a microelectromechanical system (MEMS) to ...
MEMS Based SCS Cleavage Nanogap for Thermionic Generation
Thermionic generation generates electricity by collecting th ...
Parallel tensile testing device with integrated shear strain gauge for SC-Si
In order to shorten testing time on tensile-mode fatigue tes ...
MEMS Reservoir Computing with accelerometer
Reservoir computing(RC) is a machine learning approach havin ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
Parallel tensile testing of silicon with integrated strain gauge
In order to shorten a testing time for evaluation of tensile ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...