
Mode Localization and Reservoir Computing of MEMS Resonator Array
Recently, physical reservoir computing (PRC) has attracted a ...

Development of Nanopatterning and Reactive Ion Etching of Diamond Film for NEMS Resonator Devices
Nanofabrication technologies have been evolving at an astoni ...

Piezoelectric Cylinder Gyroscope
In recent years, automatic driving has been attracting atten ...

Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating envi ...

Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...

Single-Crystal LN Piezoelectrical DRG Control System
A mode-matched single-crystal lithium niobate disk gyroscope ...

Mode-matched (100) silicon ring gyroscope
Recently, IoT society have demanded small-size and low-cost ...

Temperature dependence of electron emission between cleavage planes for thermionic power generation
シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う

MEMS reservoir computing using resonant accelerometer
Reservoir computing, which can utilize nonlinear physical dy ...

Electrical conduction property measurement of fracture-fabricated silicon nanogap
半導体微細加工技術を用いて作製した単結晶シリコンMEMSデバイスの梁構造に(111)面でへき開破壊を用いて数μm角の均一 ...

Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsio ...

Thermo-acoustic phase modulator for physical reservoir computing
This study proposes a nonlinear thermo-acoustic phase modula ...