Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した．
TEER measurement microfluidic device
Organ on a Chip is a microfluidic device to culture human ce ...
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricate ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is us ...
Thermionic generation with Nanogap
Thermionic generation is a method of power generation in whi ...
Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) film is one of the ...
A sub-micron-gap SOI capacitive accelerometer array utilizing size effect
MEMS capacitive accelerometers have been widely used for con ...
Microfabricated alkali metal vapor cells
Miniaturization and reduced power consumption of atomic-base ...
MEMS Nanogap Device
In this research, a single crystal silicon beam was cleaved ...
Double stage electrode type Ionic liquids electrospray thruster
through-hole dry etching with Ni electroplated as a mask.
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects t ...
Design and Analysis of Capacitive Vibrating Gyro using Electrical Equivalent Circuit
In this research, we aim to design the electrostatic gyro se ...