A sub-micron-gap SOI capacitive accelerometer array utilizing size effect

MEMS capacitive accelerometers have been widely used for consumer and automobile applications. Our purpose is high sensitivity and low noise level to measure motion precisely. We propose an arrayed structure to improve sensitivity without increasing volume. The size effect is investigated.

[Applications]

  •  seismic measurement
  •  geophysical exploration

2015年3月23日Research,Sensor