Synchronization of MEMS mirror array
MEMS mirrors are optical devices that scan reflected light b ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.
Assembly of single SWCNT modified by ssDNA using dielectrophoresis
To clarify the characteristic of SWCNT including its variabi ...
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensi ...
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fa ...
Double stage electrode type Ionic liquids electrospray thruster
through-hole dry etching with Ni electroplated as a mask.
Microfluidic device for separation of DNA origami complexes
Microfluidic device by using dielectrophoresis(DEP) is propo ...
Training MEMS devices for forecasting epileptic-seizures
Epilepsy is a chronic neurological disorder of the central n ...
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a microelectromechanical system (MEMS) to fabri ...
Diamond nanoresonators for sensing and information processing
Nanoresonators are capable of ultrasensitive sensing and eff ...