
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...

Electrostatic deformable mirror with moving substrate
Inspection light of funduscopy is warped by distortion of ey ...

Parallel tensile testing of silicon with integrated strain gauge
In order to shorten a testing time for evaluation of tensile ...

Properties of nanogap with single crystal silicon cleavage planes
Thermionic generation generates electricity by collecting th ...

Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, sma ...

Analysis of Love-mode SAW device with phononic crystal waveguide
Surface acoustic waves (SAW) are widely used in high-frequen ...

Equivalent Circuit Analysis for Electrostatic Vibrating Gyro with Self-contained Comb Transducer Component Model
We aim to design electrostatic vibrating gyroscopes by using ...

Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by d ...

Development of Nanopatterning and Reactive Ion Etching of Diamond Film for NEMS Resonator Devices
Nanofabrication technologies have been evolving at an astoni ...

Coupled MEMS resonators for reservoir computing
Among hardware implementation methods of neuromorphic ...

Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...

Q-factor of Si nanoresonator
Nanoresonator is a mechanical beam with nano-scale thickness ...