Assembly of single SWCNT modified by ssDNA using dielectrophoresis
To clarify the characteristic of SWCNT including its variabi ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as prom ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...
Piezoelectric Cylinder Gyroscope
In recent years, automatic driving has been attracting atten ...
MEMS Reservoir Computing
Physical reservoir computing (PRC), which utilizes nonlinear ...
MEMS Reservoir Computing with accelerometer
Reservoir computing(RC) is a machine learning approach havin ...
Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsio ...
Temperature dependence of electron emission between cleavage planes for thermionic power generation
シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う
(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction o ...
Al/Ni多層膜の自己伝播発熱反応を用いたMEMS振動型デバイスの真空封止
熱ストレスの小さいMEMS真空封止技術を実現することを目的として，ナノスケール厚で積層させたAl/Ni膜の合金化反応熱を ...