Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計，作製し高い負荷周波数での引張疲労試験の実現を目指します．
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...
Mode-matched (100) silicon ring gyroscope
Recently, IoT society have demanded small-size and low-cost ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coati ...
Tensile Testing for Carbon Nanotube using Electrostatic MEMS
We are developing the method for tensile test of Carbon nano ...
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Three-axis capacitive accelerometer
Performance requirements for seismometer are high resolution ...
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a microelectromechanical system (MEMS) to fabri ...
Microfluidic device for separation of DNA origami complexes
Microfluidic device by using dielectrophoresis(DEP) is propo ...
Nanogap device for thermionic generation
Devices and an external mechanism capable of nanogap formati ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is ne ...