Ionic liquids electrospray thruster
We have developed Ionic liquids electrospray thruster (ILEST ...
Equivalent Circuit Analysis for Electrostatic Vibrating Gyro with Self-contained Comb Transducer Component Model
We aim to design electrostatic vibrating gyroscopes by using ...
MEMS Reservoir Computing with accelerometer
Reservoir computing(RC) is a machine learning approach havin ...
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize ...
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans ...
Double stage electrode type Ionic liquids electrospray thruster
through-hole dry etching with Ni electroplated as a mask.
Evaluation of CNT-TFT response current as a reservoir
Physical reservoir computing is a machine learning that can ...
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricate ...
Dynamic Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
The aim of this research is to analyze local and instantaneo ...
Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS
Silicon nanowire has excellent mechanical and electri ...
Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsio ...