Equivalent Circuit Analysis for Electrostatic Vibrating Gyro with Self-contained Comb Transducer Component Model

We aim to design electrostatic vibrating gyroscopes by using an electrical equivalent circuit analysis. Electrostatic MEMS devices are constructed from mechanical structure, electrical circuit and electromechanical transducers. The equivalent circuit represents whole systems as circuits and analyze them together. Therefore it is useful for designing MEMS. In our former research, we built the equivalent circuit model of the electrostatic comb transducer which is independent from external parameters like spring constants and controlled voltages. In this research, the proposed model was applied to the actual gyroscope and the analysis is agreed well to measurement results. As a result, we showed that the model was able to analyze the electromechanical coupled systems.

 

Journal Article

徳崎裕幸, 平井義和, 菅野公二, 土屋智由, 田畑修, 「自己変位検出昨日を有する面内2自由度静電櫛歯トランスデューサの等価回路」, IEEJ Trans.SM, Vol.130, No.9, 2010,pp443-449

Conference Presentation

H. Tokusaki, Y. Hirai, K. Sugano, T. Tsuchiya, and O. Tabata“ Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection”, APCOT2010, Australia, July 2010

H. Tokusaki, Y. Hirai, K. Sugano, T. Tsuchiya, and O. Tabata “Equivalent circuit analysis of micromechianical resonator using comb transducer model with built-in displasement detection”, IEEE-NEMS 2011, Taiwan, Feb 2011