Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is ne ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensi ...
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Training MEMS devices for forecasting epileptic-seizures
Epilepsy is a chronic neurological disorder of the central n ...
Electrostatic deformable mirror with moving substrate
Inspection light of funduscopy is warped by distortion of ey ...
Three-axis capacitive accelerometer
Performance requirements for seismometer are high resolution ...
Equivalent Circuit Analysis for Electrostatic Vibrating Gyro with Self-contained Comb Transducer Component Model
We aim to design electrostatic vibrating gyroscopes by using ...
Characterization of ssDNA modified CNTs
Carbon nanotube (CNT) is expected to be applied to elements ...
Al/Ni多層膜の自己伝播発熱反応を用いたMEMS振動型デバイスの真空封止
熱ストレスの小さいMEMS真空封止技術を実現することを目的として，ナノスケール厚で積層させたAl/Ni膜の合金化反応熱を ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as prom ...