
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...

Physical Reservoir Computing with Heat Conduction
As the Internet of Things (IoT) continues to expand, reducin ...

Three-axis capacitive accelerometer
Performance requirements for seismometer are high resolution ...

Temperature dependence of electron emission between cleavage planes for thermionic power generation
シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う

Characterization of ssDNA modified CNTs
Carbon nanotube (CNT) is expected to be applied to elements ...

Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coati ...

Local Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
Evaluating local stress in the microstructure is in high dem ...

(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction o ...

Mode Localization and Reservoir Computing of MEMS Resonator Array
Recently, physical reservoir computing (PRC) has attracted a ...

Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting attention because t ...

Parallel tensile testing of silicon with integrated strain gauge
In order to shorten a testing time for evaluation of tensile ...

Physical Reservoir Computing Using Nonlinear Heat Conduction
As the demand for machine learning and data analysis increas ...