Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si resonator using micro Raman spectroscopy. In order to achie […]
Micromaterial
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is necessary for the reliability of MEMS in harsh environments. Si […]
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their operations, evaluation […]
Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating environment. In order to improve the reliability of such product […]
Tensile testing of silicon at high temperature
Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property is affected by temp […]
Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure. It is a brittle material, so its mechanical reliability is […]
MEMS Tensile testing of Integrated Si Nanowire
Siナノワイヤは機械的・電気的特性に優れ，これをナノスケール構造体要素として用いた幅広い応用デバイスが注目されています．これらのデバイスの実現と信頼性の向上のため，MEMS構造体への一括集積化技術とその機械特性評価をおこなっています． 【応 […]
Dynamic Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
The aim of this research is to analyze local and instantaneous stress in resonating single-crystal silicon (SCS) microst […]
Local Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
Evaluating local stress in the microstructure is in high demand for designing and manufacturing MEMS and assessing the r […]
形状記憶合金薄膜アクチュエータの基礎技術とその応用
近年加速的にデバイスの小型化が進み，これに伴い小型でかつ高性能なマイクロアクチュエータのへの要望が高まっている． 一般的なマイクロアクチュエータである静電気力駆動型は小型化・変位・応答性，また圧電駆動型は出力・応答性の点で優れている． しか […]
薄膜材料の引張疲労試験・高温引張試験
材料のサイズが非常に小さくなると，その機械特性は従来のマクロスケールの材料とは異なります． しかしMEMSデバイスの構造設計に不可欠な薄膜材料の機械的物性（引張強度，ヤング率，疲労特性，etc.）のデータベースは不足しています． ミクロサイ […]
