Time-resolved Raman stress measurement

This entry was posted in Actuators Micromaterial Research on

In this research, we measured the local dynamic stress on Si resonator using micro Raman spectroscopy. In order to achieve time-resolved measurement of local dynamic stress, pulsed laser is needed as the incident laser. So we developed and evaluated MEMS optical chopper, which modulates CW laser, then achieved the time-resolved Raman stress measurement of Si resonator.

[Applications]

  • Reliability evaluation of vibrating devices (e.g. Gyroscopes)
  • Comparison of actual device with the result of fracture experiments

Kogita_en

[Publication]  

  • “Doube-side-drive electrostatic optical chopper for time-resolved Raman spectroscopy” Optical MEMS and Nanophotonics, 19 August 2014.