Tensile strength of single crystal silicon microstructures

Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their operations, evaluation of its mechanical property is important for the reliability improvement. Single crystal silicon is a brittle material, so the fracture strength depends on many factors. This research investigates the effects of crystalline orientations and surface morphology caused by micro fabrication process to discuss the fracture criteria on microstructures.


  • Database of fracture strength of single crystal silicon
  • Design guideline of MEMS devices with hig   her reliability



  • A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, and O. Tabata, Transactions of JSME, Part A, 2013, Vol. 79, Issue 804, pp. 1191-1200.
  • A. Uesugi, Y. Hirai, K, Sugano, T, Tsuchiya, O. Tabata, The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013.