Tensile testing of silicon at high temperature

Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property is affected by temperature, but recently it is discovered that silicon’s mechanical property is affected by dimensions. It is important to elucidate its mechanism. We try to elucidate its mechanism by using a vacuum high temperature tensile test machine.

Applications 】

  • Development of standard for reliability test methods
  • Design guideline of highly reliable and functional MEMS device