Electrical equivalent circuit of electrostatic transducer

Electrostatic MEMS devices which are constructed from mechanical structure, electrical circuit and electromechanical transducers are used extensively as a sensor and an optical switch and so on. We need a complex coupled analysis as a method of analyzing them . Then we pay attention to equivalent circuit model for representing systems as circuits have an equivalence principle and analyzing them together. In our research, we treat electrostatic comb transducer as candidate and aim to construct equivalent circuit and account validity and usability of that by comparing with a real device.