Tri axis capacitive accelerometer

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Performance requirements for seismometer are high resolution, low noise level, durability and so on. We propose a differential capacitive 3-axis SOI accelerometer with novel vertical comb electrodes. Features are (1)single proof mass from SOI wafer, (2)simple fabrication flow by only surface-micromachining and (3)fully differential in all the 3-axis. To make an accelerometer for seismometer come true, we find out the factors which influence the characteristics like noise level or transverse sensitivity of the accelerometer.
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[Publications]

[Journal Paper]

    • Toshiyuki Tsuchiya, Hirofumi Funabashi, “A z-axis differential capacitive SOI accelerometer with vertical comb electrode”, Sensors and Actuators A116 pp.378-383 (2004).
    • Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata, “Design and fabrication of a differential capacitive three-axis SOI accelerometer using vertical comb electrodes”, IEEJ Transactions on Electrical and Electronic Engineering, Vol.4, No.3, pp. xxx-xxx (2009).

[International Conference]

    • H. Hamaguchi, K. Sugano, T. Tsuchiya and O. Tabata, “A Differential Capacitive Three-Axis SOI Accelerometer using Vertical Comb Electrodes” ,The 16th International Conference on Solid-State Sensors,　Actuators and Microsystems (Transducers’07), pp.1483-1486, (2007)

[Domestic Conference]

  • H. Hamaguchi, K. Sugano, T. Tsuchiya and O. Tabata, “A Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes” , Proceeding of the sensor symposium on sensors micromachines and applied systems, vol.23, pp.471-476, (2006)