Integration of multiple functional small components with MEMS is an essential technology to extend MEMS functionality. Recently, self-assembly process has been attracting much attention as a promising technique to integrate multiple functional small components with MEMS. Theme of study is constructing the theoretical model of self-assembly process which is crucial to optimize the self-assembly process parameters to get higher assembly yield. Now we use self-assembly process of micro components using DNA hybridization to construct the model.
- Tomoki Tanemura, et. al., Contact potential differnce for seqential assembly and face alignment of submillimater components, The 21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AZ, Jan. 13-17, 2008, pp. 1056-1059
- T. Tanemura, et. al., Sequential and selective self-assembly of micro components by DNA grafted polymer, The 22nd IEEE International Conference on Micro Electro Mechanical Systems, Solent, Italy, Jan. 25-29, 2009, pp. 184-187