Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと，構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い，常温での異 ...
Thermal field emission between nanogap
Thermionic conversion is a power generation method collects ...
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize ...
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a microelectromechanical system (MEMS) to fabri ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is ne ...
Chamber for Diffracted X-ray Tracking
Diffracted X-ray Tracking (DXT) method is real-time imaging ...
Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si ...
Development of Nanopatterning and Reactive Ion Etching of Diamond Film for NEMS Resonator Devices
Nanofabrication technologies have been evolving at an astoni ...
Theoretical Analysis of (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs
For small-size, low-cost and high-performance gyroscopes, wi ...
Microfluidic device for separation of DNA origami complexes
Microfluidic device by using dielectrophoresis(DEP) is propo ...
Assembly of single SWCNT modified by ssDNA using dielectrophoresis
To clarify the characteristic of SWCNT including its variabi ...
TEER measurement microfluidic device
Organ on a Chip is a microfluidic device to culture human ce ...