Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si ...
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
A geometrical compensation design method in (100) single cry ...
TEER measurement microfluidic device
Organ on a Chip is a microfluidic device to culture human ce ...
Piezoelectric Vibrating Gyroscope using Cylindrical Lithium Niobate Resonator
In recent years, automatic driving has been attracting atten ...
Q-factor of Si nanoresonator
Nanoresonator is a mechanical beam with nano-scale thickness ...
Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating envi ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
Electrostatic MEMS for tensile-testing of nanomaterials
In this research, we focus on tensile testing of these mater ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of ey ...
Thermal properties evaluation of SOI-MEMS based nanogap with cleavage plane for thermionic generation
Thermionic generation generates electricity by collecting th ...
Evaluation of CNT-TFT response current as a reservoir
Physical reservoir computing is a machine learning that can ...