Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsio ...
Thermo-acoustic phase modulator for physical reservoir computing
This study proposes a nonlinear thermo-acoustic phase modula ...
Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting attention because t ...
Dynamic Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
The aim of this research is to analyze local and instantaneo ...
Chamber for Diffracted X-ray Tracking
Diffracted X-ray Tracking (DXT) method is real-time imaging ...
Electrical equivalent circuit of electrostatic transducer
Electrostatic MEMS devices which are constructed from mechan ...
MEMS Based SCS Cleavage Nanogap for Thermionic Generation
Thermionic generation generates electricity by collecting th ...
MEMS fabricated nanogap electrodes
We have developed a microelectromechanical system (MEMS) to ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirro ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensi ...