Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, sma ...
Thermo-acoustic phase modulator for physical reservoir computing
This study proposes a nonlinear thermo-acoustic phase modula ...
Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting attention because t ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Assembly of single SWCNT modified by ssDNA using dielectrophoresis
To clarify the characteristic of SWCNT including its variabi ...
Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize high fracture str ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirro ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coati ...
Synchronization of MEMS mirror array
MEMS mirrors are optical devices that scan reflected light b ...
Mode Localization and Reservoir Computing of MEMS Resonator Array
Recently, physical reservoir computing (PRC) has attracted a ...
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricate ...