Vacuum encapsulation of MEMS using self-propagating heat reaction of Al/Ni multilayer film
Development of a new vacuum sealing technology for MEMS reso ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, high-efficiency ...
Electrostatic MEMS for tensile-testing of nanomaterials
In this research, we focus on tensile testing of these mater ...
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize ...
Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si ...
Single-Crystal LN Piezoelectrical DRG Control System
A mode-matched single-crystal lithium niobate disk gyroscope ...
Ionic liquid electrospray thruster for nanosatellite
Recently, launches of satellites weigh less than 10 kg, call ...
Local Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
Evaluating local stress in the microstructure is in high dem ...
Microfabricated alkali metal vapor cells
Miniaturization and reduced power consumption of atomic-base ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations cause ...
Analysis of Love-mode SAW device with phononic crystal waveguide
Surface acoustic waves (SAW) are widely used in high-frequen ...