Coupled MEMS resonators for reservoir computing
Among hardware implementation methods of neuromorphic ...
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fa ...
Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) film is one of the ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations cause ...
Tensile testing of silicon covered with DLC film
DLC (Diamond Like Carbon) film is one of the promising ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
A geometrical compensation design method in (100) single cry ...
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensi ...
Thermal field emission between nanogap
Thermionic conversion is a power generation method collects ...
Electrical conduction property measurement of fracture-fabricated silicon nanogap
半導体微細加工技術を用いて作製した単結晶シリコンMEMSデバイスの梁構造に(111)面でへき開破壊を用いて数μm角の均一 ...