Synchronized vibration of MEMS mirrors
MEMS torsional micromirror is an optical device that scans r ...
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coati ...
Characterization of SWCNT with ssDNA
SWCNT (Single walled carbon nanotube) is known to have excep ...
Nanogap device for thermionic generation
Devices and an external mechanism capable of nanogap formati ...
TEER measurement microfluidic device
Organ on a Chip is a microfluidic device to culture human ce ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations cause ...
MEMS reservoir computing using resonant accelerometer
Reservoir computing, which can utilize nonlinear physical dy ...