Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their operations, evaluation […]
Research
Tensile test of silicon nanowire by using electrostatic MEMS device
Silicon nanowire has excellent mechanical and electrical properties and is expected to be applies as nanostructure eleme […]
Selective assembly of DNA origami bridging over a trenched Si substrate
We demonstrated for the first time the versatility of the integration method of DNA origami on MEMS by selectively assem […]
Characterization of ssDNA modified CNTs
Carbon nanotube (CNT) is expected to be applied to elements of nano devices because of its attractive properties. We are […]
Mechanical properties characterization of DNA origami
DNA origami is one of the most promising methods to form nano-scale structures or Nano/micro systems. However the effect […]
Process Parameter Optimizer
Grayscale lithography has been attracting huge attention recent years as a solution to 3D microstructuring for MEMS appl […]
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize high efficient thermoelectric generators. To evaluate elect […]
Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating environment. In order to improve the reliability of such product […]
Micro fluidic system for drug testing
The side effect of drugs over our body is one of the problems in the drug discovery process. We propose the drug testing […]
Matrix sensitivity calibration of 3-axis accelerometer
Matrix sensitivity calibration has been proposed to evaluate sensitivities of inertial sensors as vector values. In orde […]
DNA origami purification on a chip
After synthesized, DO(DNA Origami) solution contains tons of single-stranded DNA, mis-folded DO as well as well-folded o […]
Selective fixation of DNA origami on Si substrate
DNA origami is expected to be a versatile building block to arrange nanomaterials such as metal nanoparticles, carbon na […]
