Tensile test of silicon nanowire by using electrostatic MEMS device

Silicon nanowire has excellent mechanical and electrical properties and is expected to be applies as nanostructure element of NEMS(Nano Electro Mechanical Systems). To prolong the life of NEMS and improve the reliability of them, it is necessary to reveal mechanical properties of SiNW. The objective of this research is tensile test of SiNW fabricated on MEMS device and investigate mechanical properties of SiNW


  • High speed and low energy consumption field effect transistor
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  • Nano resonator