Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si resonator using micro Raman spectroscopy. In order to achie […]
Actuators
Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating environment. In order to improve the reliability of such product […]
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a defo […]
Optimization of Membrane Structure in Capacitive ultrasonic transducer
Capacitive micromachined ultrasonic transducers (cMUTs) have been attracting attentions as an alternative to traditional […]
形状記憶合金薄膜アクチュエータの基礎技術とその応用
近年加速的にデバイスの小型化が進み，これに伴い小型でかつ高性能なマイクロアクチュエータのへの要望が高まっている． 一般的なマイクロアクチュエータである静電気力駆動型は小型化・変位・応答性，また圧電駆動型は出力・応答性の点で優れている． しか […]
