Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams

MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The device is used for various applications such as laser range finders, which require higher reliability under the condition of high frequency and large scanning angle. In this research, we are working on design and fabrication of the mirror device with long fatigue life under such conditions which is extended by size effect using the method of fabricating silicon nanowire (SiNW).


  •  Laser display
  •  Optical ranging system