Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array


 Inspection light of retinal observation is warped by distortion of eyeball. So deformable mirrors (DMs) to correct wave-front are widely utilized. We proposed a new DM, which generates large displacement. In this study, I confirm driving principle with fabricated device, and improve design with mathematical analysis model.

[Applications]

  •  Wave-front compensation element in the retinal observation
  •  Astronomical observation

[Publications]

  • A. Uno, V. K. Singh, Y. Hirai, T. Tsuchiya, O. Tabata, “Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array“, APCOT 2016, Japan, June 2016

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    A. Uno, Y. Hirai, T. Tsuchiya, O. Tabata, “MEMS Deformable Mirror Actuated By Electrostatic Piston Array”, Optical MEMS and Nanophotonics, Singapore, August 2016