Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array

Deformable mirror is used in adaptive optics for retinal observation with higher resolution. it is necessary to control the shape of the mirror surface about 10 mm in diameter within the range of maximum displacement of about 3 μm. We proposes a new structure that realizes convex deformation and low voltage driving and we are working on research to realize it.


  •  Wave-front compensation element in the retinal observation


  • Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array, Electrical Engineering in Japan.  Vol. 204, Issue 2, 2018, pp. 50-60. 
  • Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Zernike Generation with MEMS Deformable Mirror Actuated by Electrostatic Piston Array
    The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), Belfast, Northern Ireland, (January 21-25, 2018), pp. 704-711.