DNA origami which is the sheet of 100nm scale manufactured with DNA is expected its application in biology as the macromolecule which can manufacture small complicated structure. In this study, we focus attention on applying DNA origami to MEMS (Micro Electro Mechanical Systems) as a minute function element and suggest the efficient technique to mount DNA origami on the integrated substrate with a microfluidic device. In addition, our aim is to make the minute light guide with the DNA origami which joined nanoparticles.