Electrostatic deformable mirror with moving substrate

Inspection light of funduscopy is warped by distortion of eyeballs and atmospheric vibration. So it’s required to correct the wavefront instantly and accurately. For this, deformable mirrors (DMs) that can correct wavefront by reflecting the light are widely utilized. Our lab suggested a new DM, which can realize large displacement. In this study, I establish fabrication process of the DM, fabricate it and build a simple mathematics analysis model to control a shape of the DM.

[Applications]

  • 　Wavefront adaptive element in the funduscopy
  • 　Astronomical observation

[Publications]

  • Large-displacement electrostatic deformable mirror with movable bottom electrodes
    The 2014 International Conference on Optical MEMS and Nanophotonics (OMN 2014), Glasgow, Scotland (17-21 Aug. 2014), pp.119-120.

2015年4月20日Actuators,Research