Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure

In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro structure, we have developed parallel tensile testing device with integrated strain gauge. This research proposes the parallel tensile fatigue test device integrating shear strain gauge as a load sensor and we aim to realize tensile fatigue test at high load frequency. The high stiffness helps decreasing actuator amplitude and increasing drive frequency, so fatigue testing time will shorten.


  • Database of fracture strength of single crystal silicon
  • Design guideline of MEMS   devices with a higher reliability


  • A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata, The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), 13P-11-124L.
  • K. Yasuda, A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata, Integrated shear strain gauge for parallel tensile-mode fatigue testing device, International Symposium on Micro-Nano Science and Technology 2016 (MNST 2016), The University of Tokyo, Japan (16 – 18 Dec. 2016).