Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal obs ...
SAW Devices for Reservoir Computing
We are developing SAW (Surface acoustic wave) devices which ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coati ...
Double stage electrode type Ionic liquids electrospray thruster
through-hole dry etching with Ni electroplated as a mask.
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a microelectromechanical system (MEMS) to fabri ...
Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, high-efficiency ...
Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと，構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い，常温での異 ...
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize ...
Electrical conduction property measurement of fracture-fabricated silicon nanogap
半導体微細加工技術を用いて作製した単結晶シリコンMEMSデバイスの梁構造に(111)面でへき開破壊を用いて数μm角の均一 ...
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans ...
Thermo-acoustic phase modulator for physical reservoir computing
This study proposes a nonlinear thermo-acoustic phase modula ...