10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Nanogap device for thermionic generation
Devices and an external mechanism capable of nanogap formati ...
Piezoelectric Cylinder Gyroscope
In recent years, automatic driving has been attracting atten ...
Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si ...
SAW Devices for Reservoir Computing
We are developing SAW (Surface acoustic wave) devices which ...
Parallel tensile testing device with integrated shear strain gauge for SC-Si
In order to shorten testing time on tensile-mode fatigue tes ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensi ...
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser ...
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, ...
MXene/bentonite thin film for highly sensitive humidity sensor
Humidity sensors are integral to modern technology and exten ...
Synchronization of MEMS mirror array
MEMS mirrors are optical devices that scan reflected light b ...
Electrochemical properties of MXene/CNT thin film
MXene, which is a two-dimensional layered nanomaterial, exhi ...