DLC (Diamond Like Carbon) film is one of the promising  coating material in MEMS industry deal to its many desirable properties. Understanding the mechanical properties, especially tensile strength is required for optimum design of DLC coated MEMS. In this research, The tensile testing was carried on micro-scaled Si thin film full coated by PECVD DLC film with different deposition bias by PECVD method.


  • To improve the reliability of  MEMS device