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A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) has bee ...

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せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.

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Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is possible to provid ...

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A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) with no ...