Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. E ...
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser ...
Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した．
Diamond nanoresonators for sensing and information processing
Nanoresonators are capable of ultrasensitive sensing and eff ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coati ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered poten ...
Three-axis capacitive accelerometer
Performance requirements for seismometer are high resolution ...
Thermionic generation with Nanogap
Thermionic generation is a method of power generation in whi ...
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fa ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of ey ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計，作製し高い負荷周波数での引張疲労試験の実現を目指します．