Resonant mirror scanner using SiNW

 Torsion mirror is a scanning device that scans a laser beam by reflecting it. The device is used for various applications, but the device for optical ranging system on autonomous cars requires not only high performance but also high reliability. In this research, we are working on design and fabrication of the improved mirror device by downsizing, array arrangement, and using the method of fabricating silicon nanowire (SiNW).


  •  Laser display
  •  Optical ranging system