Ultrathin Si resonator for gas sensing

Nano-scale mechanical resonator devices have emerged as promising candidates for constructing ultrasensitive sensors capable of detecting mass, force, and charge, among other variables. Our primary objective is to harness this exceptional mass sensitivity to develop state-of-the-art gas sensors. With their compact size, low power consumption, and compatibility with smartphone ecosystems, NEMS resonator devices have the potential to revolutionize portable gas sensors, enabling early detection of specific metabolic diseases. Additionally, our research will investigate the unique fundamental dynamic behaviors exhibited by these devices to further our understanding and enhance their capabilities.


Wei Yu, Amit Banerjee, Yoshikazu Hirai, Jun Hirotani, Toshiyuki Tsuchiya.
Ultrathin Si NEMS Resonators for Gas Sensing with Ultrahigh Sensitivity.
2022 IEEE 17th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 14-17 April 2022 (Virtual Conference), T2.3.2

Wei Yu, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
Fabrication and Dynamic Characterization of Ultrathin Si NEMS Resonators
2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022), Nagoya, Japan, Aug. 28-31, 2022, C1-3-05.