超高感度ガスセンサに向けた極薄シリコン振動子

Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensitive sensors of mass, force, charge, etc. Our goal is to exploit such high mass sensitivity for developing ultrasensitive gas sensors. Small-size, low power consumption and compatibility with smart-phone eco-system of NEMS resonator devices can lead to potential applications in portable sensors of gases that are early indicators of certain metabolic diseases.

[Applications]

  • 　Ultrahigh sensitive molecule sensor for early detection of disease.
  • 　Electronic nose for health monitoring.

Fabrication,Research,SensorResonator,Silicon