Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS
Silicon nanowire has excellent mechanical and electrical properties and is expected to be applies as nanostructure ele […]
Research
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed for controlled fracture of a silicon micro-beam, a promising m […]
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer and automobile applications. Our purpose is to improve sens […]
Electromagnetic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a defo […]
Micro fluidic system for drug testing
In the process of drug development, animal testing has low reliability because it doesn’t represent human physiological […]
Lithography of composite material
Composite material consisted of base material and fillers is new material for micro device represented by MEMS. The conc […]
Electrostatic deformable mirror with moving substrate
Inspection light of funduscopy is warped by distortion of eyeballs and atmospheric vibration. So it’s required to correc […]
CNT fixation on DNA origami using linker
DNA origami work breadboard for nanomaterials. Single strand DNA has a tendency to wrap CNT. My research topic is to imp […]
Purification of DNA nanostructure based on microfluidic device
For effective usage, DNA nanostructure undergoes a process called purification after its fabrication, during which only […]
Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si resonator using micro Raman spectroscopy. In order to achie […]
A sub-micron-gap SOI capacitive accelerometer array utilizing size effect
MEMS capacitive accelerometers have been widely used for consumer and automobile applications. Our purpose is high sensi […]
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is necessary for the reliability of MEMS in harsh environments. Si […]
