# Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS

Silicon nanowire has excellent mechanical and electrical properties and is expected to be applies as nanostructure element of various devices. To realize them and improve their reliability, it is necessary to reveal mechanical properties of SiNW fabricated by the process used in fabricating of actual devices. In this research, for tensile strength evaluation of SiNW, the integration process of SiNW to MEMS is developed and tensile test of the SiNW is conducted.

[Applications]

• High speed and low energy consumption field effect transistor
• High sensitivity bio sensor
• Nano resonator

[Presentations]

• T. Hemmi et al., 26th Micromechanics and Microsystems Europe workshop, 2015.

• T. Hemmi et al., 7th Micro Nano Engineering Symposium, 2015.