Electromagnetic-driven deformable mirror device
Adaptive optics is a significant device that corrects the wavefront aberrations. This system is composed of deformable m […]
Yearly Archives: 2016
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of eyeball. So deformable mirrors (DMs) to correct light instantl […]
parallel tensile testing of silicon with integrated strain gauge
In order to shorten a testing time for evaluation of tensile-mode fatigue properties of single crystal silicon, we have […]
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is necessary for the reliability of MEMS in harsh environments. Si […]
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their operations, evaluation […]
２D array formation of DNA origami
DNA origami that is the way to make nano-scale structure has some characteristics, arranging nano-material on DNA origam […]
On-chip size-separtion of DNA nanostructures
The aim of this research is to establish microfluidic system to perform size-separation of biomolecules such as DNA and […]
3D lithography simulator for thick negative photoresist
Lithography has been attracting huge attention recent years as a solution to 3D microstructuring for MEMS applications. […]
Low-noise microchamber for diffracted X-ray tracking method
The diffracted X-ray tracking (DXT) method has been applied for capturing conformational changes of single KcsA potassiu […]
Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS
Silicon nanowire has excellent mechanical and electrical properties and is expected to be applies as nanostructure ele […]
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed for controlled fracture of a silicon micro-beam, a promising m […]
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer and automobile applications. Our purpose is to improve sens […]
