Lithography has been attracting huge attention recent years as a solution to 3D microstructuring for MEMS applications. In our research, I focused on the method presented by the collaborator, Florian(University of Freiburg, Germany), and developed 3D lithography simulator for the presented method using experimental parameters.
[Applications]
- 3D microstructuring based on projection photolithography
- MEMS, Micro fluidic system, etc.
[Related Publication]
- F. Larramendy, et al. “Microchannel-connected SU-8 honeycombs by single-step projection photolithography for positioning cells on silicon oxide nanopillar arrays.” Journal of Micromechanics and Microengineering 25.4 (2015):