3D lithography simulator for thick negative photoresist

nakamura_enLithography has been attracting huge attention recent years as a solution to 3D microstructuring for MEMS applications. In our research, I focused on the method presented by the collaborator, Florian(University of Freiburg, Germany), and developed 3D lithography simulator for the presented method using experimental parameters.


  • 3D microstructuring based on projection photolithography
  • MEMS, Micro fluidic system, etc.  

[Related Publication]nakamura2_en

  • F. Larramendy, et al. “Microchannel-connected SU-8 honeycombs by single-step projection photolithography for positioning cells on silicon oxide nanopillar arrays.” Journal of Micromechanics and Microengineering 25.4 (2015):