SEMICON Japan 2014
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Yearly Archives: 2014
MNC 2014
Sorry, this entry is only available in 日本語.
Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating environment. In order to improve the reliability of such product […]
Micro fluidic system for drug testing
The side effect of drugs over our body is one of the problems in the drug discovery process. We propose the drug testing […]
Matrix sensitivity calibration of 3-axis accelerometer
Matrix sensitivity calibration has been proposed to evaluate sensitivities of inertial sensors as vector values. In orde […]
DNA origami purification on a chip
After synthesized, DO(DNA Origami) solution contains tons of single-stranded DNA, mis-folded DO as well as well-folded o […]
Selective fixation of DNA origami on Si substrate
DNA origami is expected to be a versatile building block to arrange nanomaterials such as metal nanoparticles, carbon na […]
Tensile testing of silicon at high temperature
Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property is affected by temp […]
Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure. It is a brittle material, so its mechanical reliability is […]
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a defo […]
